Dual-Gate ZnO Thin-Film Transistors with SiNx as Dielectric Layer.
Young Su KimMin Ho KangKang Suk JeongJae Sub OhYu Mi KimDong Eun YooHi Deok LeeGa Won LeePublished in: IEICE Trans. Electron. (2011)
Keyphrases
- thin film
- high density
- silicon dioxide
- space charge
- field effect transistors
- chemical vapor deposition
- short circuit
- multi layer
- low density
- grain size
- cmos technology
- electron microscopy
- liquid crystal displays
- electric field
- plasma etching
- solar cell
- gate dielectrics
- neural network
- low power
- data center
- silicon nitride
- white light interferometry
- film thickness
- integrated circuit
- power consumption
- machine learning
- data mining