Using a self-organizing neural network for wafer defect inspection.
Chuan-Yu ChangJia-Wei ChangMuDer JengPublished in: SMC (5) (2004)
Keyphrases
- defect detection
- automated visual inspection
- quality control
- semiconductor manufacturing
- machine vision
- manufacturing process
- feature extraction
- massively parallel
- integrated circuit
- visual inspection
- domain knowledge
- image features
- multi view
- case study
- special case
- active learning
- object recognition
- video sequences
- bayesian networks
- high quality
- high level