Deep Penetration of UV Radiation into PMMA and Electron Acceleration in Long Plasma Channels Produced by 100 ns KrF Laser Pulses.
Vladimir D. ZvorykinSergei V. ArlantsevAlexey V. ShutovNikolay N. UstinovskiiPolad V. VelievPublished in: Symmetry (2021)
Keyphrases
- electron beam
- x ray
- high energy
- integrated circuit
- electron beam lithography
- design parameters
- infrared
- electric field
- thin film
- high density
- network simulator
- low dose
- multi channel
- noise level
- visible spectrum
- laser beam
- electron microscopy
- electron microscope
- plasma etching
- fiber optic
- case study
- communication channels
- mobile robot
- user interface