Effects of the compositional ratios of sputtering target on the device performance and instability in amorphous InGaZnO thin film transistors.
Hee Pyung ParkSang Woo KimJoong-Won ShinWon-Ju ChoJong Tae ParkPublished in: Microelectron. Reliab. (2018)
Keyphrases
- thin film
- high density
- field effect transistors
- film thickness
- short circuit
- semiconductor devices
- solar cell
- electron microscopy
- plasma etching
- low density
- white light interferometry
- grain size
- magnetic field
- room temperature
- low power
- chemical vapor deposition
- fuzzy logic
- machine learning
- multi layer
- project management
- data center
- steady state
- neural network