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BEOL tip-to-tip dielectric reliability characterization using a design-representative test structure.
Y. Fang
Alicja Lesniewska
Ivan Ciofi
Philippe Roussel
Chen Wu
Victor Vega-Gonzalez
Ingrid De Wolf
Kris Croes
Published in:
IRPS (2024)
Keyphrases
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design process
case study
computer aided
engineering design
position and orientation
information retrieval
social networks
information systems
website
user interface
test data
hierarchical structure
statistical tests