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Resistive Bridging Defect Detection in Bulk, FDSOI and FinFET Technologies.
Amit Karel
Mariane Comte
Jean Marc Gallière
Florence Azaïs
Michel Renovell
Published in:
J. Electron. Test. (2017)
Keyphrases
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defect detection
textured surfaces
automated visual inspection
data mining
feature extraction
st century
information systems
database
real time
social networks
knowledge base
information technology
human factors
emerging technologies