Discriminative Feature Selection Based on Imbalance SVDD for Fault Detection of Semiconductor Manufacturing Processes.
Jian WangJian FengZhiyan HanPublished in: J. Circuits Syst. Comput. (2016)
Keyphrases
- fault detection
- manufacturing processes
- feature selection
- discriminative features
- industrial processes
- manufacturing systems
- fault diagnosis
- class imbalance
- condition monitoring
- tennessee eastman
- product quality
- fault identification
- outlier detection
- feature extraction
- support vector data description
- failure detection
- fault detection and diagnosis
- rapid prototyping
- feature space
- feature set
- support vector
- fuel cell
- quality control
- power plant
- mathematical models
- semi supervised
- knowledge base
- feature subset
- neural network
- class distribution