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Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface.
Kanishka Biswas
Soumen K. Das
D. K. Maurya
S. Kal
S. K. Lahiri
Published in:
Microelectron. J. (2006)
Keyphrases
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smooth surfaces
thin film
surface reconstruction
high density
image intensity
gate insulator
surface normals
curved surfaces
single view
object surface
range data
planar surfaces
surface orientation
viewpoint
silicon dioxide