Fabrication and characterization of Al gate n-MOSFET, on-chip fabricated with Si3N4 ISFET.
Rekha ChaudharyAmit SharmaSoumendu SinhaJitendra YadavRishi SharmaRavindra MukhiyaVinod K. KhannaPublished in: VDAT (2015)
Keyphrases
- cmos technology
- high speed
- silicon on insulator
- low power
- high density
- power consumption
- low voltage
- leakage current
- electron beam
- metal oxide
- mixed signal
- image sensor
- power dissipation
- cmos image sensor
- parallel processing
- single chip
- plasma etching
- nm technology
- ibm power processor
- field effect transistors
- low cost
- electrical properties
- programmable logic
- real time
- chemical vapor deposition
- database replication
- analog vlsi
- multiple input
- vlsi implementation
- focal plane
- neural network