A Novel Visual Fault Detection and Classification System for Semiconductor Manufacturing Using Stacked Hybrid Convolutional Neural Networks.
Tobias SchlosserFrederik BeuthMichael FriedrichDanny KowerkoPublished in: CoRR (2019)
Keyphrases
- fault detection
- semiconductor manufacturing
- convolutional neural networks
- pattern recognition
- fault diagnosis
- industrial processes
- fault identification
- image classification
- machine learning
- process control
- condition monitoring
- feature extraction
- failure detection
- fault detection and isolation
- tennessee eastman
- robust fault detection
- discrete event simulation
- fault detection and diagnosis
- input output
- fuel cell
- expert systems