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Functional networks models for rapid characterization of thin films: An application to ultrathin polycrystalline silicon germanium films.
T. B. Asafa
Ahmed Adebowale Adeniran
Sunday Olusanya Olatunji
Published in:
Appl. Soft Comput. (2015)
Keyphrases
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thin film
chemical vapor deposition
film thickness
grain size
silicon nitride
short circuit
plasma etching
high density
electrical properties
room temperature
gate dielectrics
solar cell
probabilistic model
high impact
neural nets
data warehouse
data streams