CO Responses of Sensors Based on Cerium Oxide Thick Films Prepared from Clustered Spherical Nanoparticles.
Noriya IzuIchiro MatsubaraToshio ItohTakafumi AkamatsuWoosuck ShinPublished in: Sensors (2013)
Keyphrases
- transmission electron microscopy
- metal oxide
- x ray
- electrical properties
- silicon dioxide
- room temperature
- sensor networks
- multi sensor
- data fusion
- silicon nitride
- high resolution
- sensor data
- three dimensional
- real time
- electron microscopy
- spherical harmonics
- high speed
- film thickness
- arbitrary shape
- imaging sensors
- ni fe
- field of view
- data acquisition
- gate insulator