Fabrication of an ammonia microsensor based on zinc oxide.

Ming-Zhi Yang Ching-Liang Dai

Published in: NEMS (2013)

Keyphrases

electrical properties
fuel cell
integrated circuit
high density
electron microscopy
room temperature
silicon nitride
high speed
visual sensor networks
electron beam
field effect transistors
si sio
real time
multiscale
data mining
neural network
leakage current
metal oxide