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Bending of multi-graphene by nanomanipulation assisted with electron beam irradiation for box structure.

Takafumi FujiwaraMasahiro NakajimaAkihiko IchikawaKenichi OharaYasuhisa HasegawaToshio Fukuda
Published in: IECON (2015)
Keyphrases
  • particle swarm optimization
  • electron beam
  • multi objective
  • integrated circuit
  • semiconductor devices
  • x ray
  • design parameters
  • case study
  • optimal solution