Electrical Characterization of Low-Temperature Boron on Silicon Deposition utilizing Molecular Beam Epitaxy.
Jan F. DickAsser ElsayedDaniel SchwarzJörg SchulzePublished in: MIPRO (2019)
Keyphrases
- electrical properties
- plasma etching
- printed circuit boards
- chemical vapor deposition
- gate dielectrics
- liquid crystal
- low cost
- thin film
- high density
- high speed
- transmission line
- three dimensional
- power grid
- dna computing
- transmission electron microscopy
- silicon dioxide
- low density
- power distribution
- cross section
- distribution networks
- low voltage
- reinforced concrete
- molecular structure