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Bottom Oxide Bulk FinFETs Without Punch-Through-Stopper for Extending Toward 5-nm Node.

Jun-Sik YoonJinsu JeongSeunghwan LeeRock-Hyun Baek
Published in: IEEE Access (2019)
Keyphrases
  • metal oxide
  • transmission electron microscopy
  • leakage current
  • x ray
  • graph structure
  • fuel cell
  • databases
  • neural network
  • knowledge base
  • directed graph
  • path length
  • electron microscopy