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Reliability and Breakdown Study of Erase Gate Oxide in Split-Gate Non-Volatile Memory Device.
Laiqiang Luo
Kalya Shubhakar
Sen Mei
Nagarajan Raghavan
Fan Zhang
Danny Shum
Kin Leong Pey
Published in:
IRPS (2020)
Keyphrases
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field effect transistors
silicon dioxide
leakage current
high density
statistical analysis
flash memory