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high-k gate dielectric grown by anodic oxidation or deposited by sol-gel.
Jacques Tardy
Mohsen Erouel
A. L. Deman
A. Gagnaire
V. Teodorescu
M. G. Blanchin
B. Canut
A. Barau
M. Zaharescu
Published in:
Microelectron. Reliab. (2007)
Keyphrases
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