Feature extraction, condition monitoring, and fault modeling in semiconductor manufacturing systems.
Alexander BleakieDragan DjurdjanovicPublished in: Comput. Ind. (2013)
Keyphrases
- manufacturing systems
- condition monitoring
- fault detection
- fault diagnosis
- feature extraction
- nuclear power plant
- flexible manufacturing systems
- complex systems
- power transformers
- manufacturing environment
- petri net
- shop floor
- acoustic emission
- vibration signal
- quality control
- image processing
- tool wear
- feature selection
- manufacturing processes
- holonic manufacturing systems
- control structure
- manufacturing process
- wavelet transform
- data mining
- modeling method
- manufacturing cell
- fuzzy logic
- machine learning