Mechanical and Optical Investigations of Cr Thin Films Deposited on Si Substrate.
Denis E. TrancaArcadie SobetkiiRadu HristuStefan R. AntonStefan G. StanciuEfstathios FiorentisEugeniu VasileCosmin Karl BanicaGeorge A. StanciuPublished in: ICTON (2023)
Keyphrases
- film thickness
- thin film
- white light interferometry
- solar cell
- chemical vapor deposition
- refractive index
- plasma etching
- electrical properties
- silicon nitride
- high density
- room temperature
- multi layer
- electron microscopy
- short circuit
- grain size
- machine learning
- databases
- surface normals
- surface reconstruction
- sensor networks
- neural network