Self-Aligned Planar Metal Double-Gate Polycrystalline-Silicon Thin-Film Transistors Fabricated at Low Temperature on Glass Substrate.
Hiroyuki OgataKenji IchijoKenji KondoAkito HaraPublished in: IEICE Trans. Electron. (2013)
Keyphrases
- thin film
- field effect transistors
- high density
- semiconductor devices
- film thickness
- waveguide
- low density
- high speed
- grain size
- data center
- short circuit
- chemical vapor deposition
- electron microscopy
- plasma etching
- solar cell
- gate dielectrics
- steady state
- room temperature
- white light interferometry
- neural network
- cmos technology
- mathematical analysis
- ground plane
- silicon nitride
- data mining