Silicon Mach-Zehnder Waveguide Interferometer on Silicon-on-Silicon (SOS) Substrate Incorporating the Integrated Three-Terminal Field-Effect Device as an Optical Signal Modulation Structure.
Ricky W. ChuangMao-Teng HsuShen-Horng ChouYao-Jen LeePublished in: IEICE Trans. Electron. (2011)
Keyphrases
- semiconductor devices
- electro optic
- waveguide
- high density
- low cost
- field effect transistors
- liquid crystal
- charge coupled device
- electron beam
- high speed
- transmission electron microscopy
- silicon dioxide
- plasma etching
- cmos technology
- thin film
- metal oxide semiconductor
- computer simulation
- signal processing
- gallium arsenide