NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor.
Huimei ZhouMiaomiao WangJingyun ZhangKoji WatanabeCurtis DurfeeShogo MochizukiRuqiang BaoRichard G. SouthwickMaruf BhuiyanBasker VeeraraghavanPublished in: IRPS (2020)