NBTI Impact of Surface Orientation in Stacked Gate-All-Around Nanosheet Transistor.

Huimei Zhou Miaomiao Wang Jingyun Zhang Koji Watanabe Curtis Durfee Shogo Mochizuki Ruqiang Bao Richard G. Southwick Maruf Bhuiyan Basker Veeraraghavan

Published in: IRPS (2020)

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