Fast flexible thin-film transistors with deep submicron channel enabled by nanoimprint lithography.
Jung-Hun SeoTao LingL. Jay GuoZhenqiang MaPublished in: RWS (2016)
Keyphrases
- thin film
- high density
- electron beam
- integrated circuit
- field effect transistors
- low power
- short circuit
- electron microscopy
- solar cell
- low density
- white light interferometry
- vlsi circuits
- room temperature
- multi channel
- grain size
- plasma etching
- power consumption
- liquid crystal displays
- chemical vapor deposition
- databases
- design parameters
- low cost