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Substrate current and degradation of n-channel polycrystalline silicon thin-film transistors.
N. A. Hastas
N. Archontas
C. A. Dimitriadis
G. Kamarinos
T. Nikolaidis
N. Georgoulas
Adonios Thanailakis
Published in:
Microelectron. Reliab. (2005)
Keyphrases
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thin film
high density
short circuit
field effect transistors
plasma etching
solar cell
film thickness
semiconductor devices
chemical vapor deposition
low density
grain size
data center
electron microscopy
white light interferometry
integrated circuit
room temperature