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Wei-Fong Chi
Publication Activity (10 Years)
Years Active: 2015-2015
Publications (10 Years): 0
Top Topics
Electrical Properties
Leakage Current
Film Thickness
Silicon Dioxide
Top Venues
Microelectron. Reliab.
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Publications
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Wei-Fong Chi
,
Kuei-Shu Chang-Liao
,
Shih-Han Yi
,
Chen-Chien Li
,
Yan-Lin Li
Gate leakage current suppression and reliability improvement for ultra-low EOT Ge MOS devices by suitable HfAlO/HfON thickness and sintering temperature.
Microelectron. Reliab.
55 (11) (2015)