Selective patterning of indium tin oxide films using 1064 nm laser for micro parts processing.

Kun-Tse Tu Chen-Kuei Chung

Published in: NEMS (2014)

Keyphrases

metal oxide
room temperature
transmission electron microscopy
x ray
data processing
silicon dioxide
leakage current
real time
electrical properties
neural network
learning algorithm
integrated circuit
electron microscopy