Univiariate Signal Preprocessing Methodology for Fault Detection in Semiconductor Manufacturing Process.
Kyuchang ChangJun-Geol BaekPublished in: CSE/EUC (2019)
Keyphrases
- fault detection
- manufacturing process
- preprocessing
- process control
- fault diagnosis
- industrial processes
- fault identification
- quality control
- condition monitoring
- vibration signal
- tennessee eastman
- failure detection
- manufacturing systems
- product design
- robust fault detection
- discrete event
- control system
- product quality
- power plant
- process planning
- underwater vehicles
- rough sets
- multi agent systems
- information systems
- data mining