Growing Sub-micron Diamond Films by A Novel Microwave Plasma Jet CVD System.

Chii-Ruey Lin Chun-Hsi Su Guo-Tsai Liao Hsin-Chin Hung Chih-Ming Hsu

Published in: SMC (2006)

Keyphrases

chemical vapor deposition
plasma etching
thin film
high density
grain size
machine learning
multiscale
scale invariant
data mining
multiresolution
flow field
database
three dimensional
fluid flow
high energy
ni fe
electron micrographs