A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge.
Kenle ChenYueyang DaiXudong ZouJinwen ZhangPublished in: NEMS (2009)
Keyphrases
- silicon dioxide
- relevance feedback
- high speed
- significantly lower
- three dimensional
- range data
- high temperature
- application layer
- radio frequency
- leakage current
- smooth surfaces
- free form
- object surface
- surface reconstruction
- frequency band
- shape recovery
- surface shape
- d objects
- reliability assessment
- object recognition
- information retrieval