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Reliability evaluation of a silicon-on-silicon MCM-D package.
J. Barton
G. McCarthy
R. Doyle
K. Delaney
Enric Cabruja
Manuel Lozano
Ana Collado
Joaquín Santander
Published in:
Microelectron. Reliab. (2001)
Keyphrases
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high speed
high density
low cost
gold standard
evaluation model
gallium arsenide
evaluation method
open source
evaluation criteria
expert systems
three dimensional
knowledge base
reliability analysis
space charge
silicon dioxide
plasma etching
gate dielectrics
machine learning