Sign in
Investigation of Low-Damage Sputter-Deposition of ITO Films on Organic Emission Layer.
Hao Lei
Keisuke Ichikawa
Meihan Wang
Yoichi Hoshi
Takayuki Uchida
Yutaka Sawada
Published in:
IEICE Trans. Electron. (2008)
Keyphrases
</>
electrical properties
chemical vapor deposition
metal oxide
thin film
silicon dioxide
film thickness
grain size
permalloy films
multi layer
application layer
plasma etching
metadata
neural network
database systems
website
information retrieval
machine learning