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SrTiO3 thin film decoupling capacitors on Si interposers for 3D system integration.

Koichi TakemuraKatsuya KikuchiChihiro UedaKazuhiro BabaMasahiro AoyagiKanji Otsuka
Published in: 3DIC (2009)
Keyphrases
  • thin film
  • solar cell
  • short circuit
  • chemical vapor deposition
  • chance discovery
  • high density
  • plasma etching
  • multi layer
  • input output
  • electron microscopy
  • grain size
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