Substrate material influence on the deep-ultraviolet surface plasmon resonance sensors using aluminum films.
Cleumar S. MoreiraYunshan WangSteve BlairPublished in: IEEE SENSORS (2019)
Keyphrases
- film thickness
- thin film
- high density
- silicon nitride
- infrared
- data fusion
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- electrical properties
- sensor data
- multi layer
- multi sensor
- stainless steel
- refractive index
- mechanical properties
- real time
- three dimensional
- grain size
- room temperature
- image sequences
- chemical vapor deposition
- rf sputtering
- surface model
- high resolution
- image formation
- d objects
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