A magnetic thin film microrobot with two operating modes.

Wuming Jing Xi Chen Sean Lyttle Zhenbo Fu Yong Shi David J. Cappelleri

Published in: ICRA (2011)

Keyphrases

thin film
film thickness
high density
short circuit
multi layer
grain size
white light interferometry
magnetic field
solar cell
room temperature
databases
plasma etching
software development
electron microscopy
chemical vapor deposition
data management
low cost
neural network