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Synthesis of Gallium Oxide from the Elements at RF Plasma Discharge in the Argon-Oxygen Mixture.
Alexander Logunov
Leonid Mochalov
Daniela Gogova
Vladimir Vorotyntsev
Published in:
ICTON (2019)
Keyphrases
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room temperature
thin film
electron microscopy
silicon nitride
magnetic field
rf sputtering
high density
mixture model
radio frequency
plasma etching
chemical vapor deposition
three dimensional
program synthesis
multi layer
expectation maximization
high temperature
gaussian mixture model