Deep Image Segmentation for Defect Detection in Photo-lithography Fabrication.
Omari PaulSakib AbrarRichard MuRiadul IslamManar D. SamadPublished in: ISQED (2023)
Keyphrases
- defect detection
- image segmentation
- electron beam
- electron beam lithography
- integrated circuit
- feature extraction
- multiscale
- computer vision
- textured surfaces
- x ray
- segmentation method
- image processing
- deformable models
- high density
- method for image segmentation
- boundary detection
- level set
- medical imaging
- image analysis
- automated visual inspection
- neural network
- unsupervised image segmentation
- image segmentation algorithm
- graph cuts
- spectral clustering
- semiconductor devices
- high speed
- segmenting images
- markov random field model
- markov random field
- contour detection
- design parameters
- deep learning
- region merging
- region segmentation
- region growing
- probabilistic relaxation
- active contours
- multilevel thresholding
- energy function
- energy functional
- otsu method