In-line metrology and inspection for process control during 3D stacking of IC's.
Sandip HalderIngrid De WolfAlain PhommahaxayAndy MillerMireille MaenhoudtGerald BeyerBart SwinnenEric BeynePublished in: 3DIC (2011)
Keyphrases
- process control
- control system
- intelligent control
- product quality
- manufacturing process
- integrated circuit
- combining multiple
- printed circuit boards
- automatic inspection
- line segments
- line drawings
- data sets
- control charts
- semiconductor manufacturing
- visual inspection
- graduate education
- case study
- genetic algorithm