Heterogeneous Oxide Semiconductor FETs Comprising Planar FET and Vertical Channel FETs Monolithically Stacked on Si CMOS, Enabling 1-Mbit 3D DRAM.
Hiraki InoueTakeya HiroseToshiki MizuguchiYusuke KomuraToshihiko SaitoMinato ItoKiyotaka KimuraTatsuya OnukiYoshinori AndoHiromi SawaiTsutomu MurakawaHitoshi KunitakeTakanori MatsuzakiHajime KimuraMakoto IkedaShunpei YamazakiPublished in: IMW (2024)