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Degradation of polycrystalline silicon TFTs due to alpha particles irradiation stress.
Loukas Michalas
George J. Papaioannou
Apostolos T. Voutsas
Published in:
Microelectron. Reliab. (2010)
Keyphrases
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thin film
plasma etching
high density
chemical vapor deposition
multi layer
swarm optimization
low density
low cost
swarm intelligence
particle swarm
database
neural network
learning algorithm
stress distribution