Optimization and fabrication of low stress-low temperature silicon oxide cantilevers.
Abhijeet KshirsagarSiddhartha Prakash DuttaguptaShashikala Achyut GangalPublished in: NEMS (2011)
Keyphrases
- high density
- electrical properties
- silicon dioxide
- high speed
- si sio
- plasma etching
- optimization problems
- low cost
- optimization process
- optimization algorithm
- global optimization
- integrated circuit
- transmission electron microscopy
- discrete optimization
- field effect transistors
- genetic algorithm
- semiconductor devices
- neural network
- optimization model
- thin film transistor
- optimization methods
- evolutionary algorithm
- silicon nitride