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Contact to contacts or silicide by use of backside FIB circuit edit allowing to approach every active circuit node.
Rudolf Schlangen
Peter Sadewater
Uwe Kerst
Christian Boit
Published in:
Microelectron. Reliab. (2006)
Keyphrases
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high speed
analog circuits
electronic circuits
digital circuits
circuit design
machine learning
tunnel diode
analog vlsi
delay insensitive
computer vision
information retrieval
frequency response
low voltage
multi agent
duty cycle
real time
gallium arsenide