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Self-Aligned Four-Terminal Planar Metal Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors for System-on-Glass.
Akito Hara
Shinya Kamo
Tadashi Sato
Published in:
IEICE Trans. Electron. (2014)
Keyphrases
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thin film
field effect transistors
high density
low density
semiconductor devices
chemical vapor deposition
short circuit
solar cell
data center
grain size
steady state
plasma etching
room temperature
cmos technology
mathematical analysis
space charge
electron microscopy
gate dielectrics