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Thin-film silicon-on-sapphire LDMOS structures for RF power amplifier applications.
Jaume Roig
David Flores
Salvador Hidalgo
José Rebollo
José Millán
Published in:
Microelectron. J. (2004)
Keyphrases
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thin film
high density
high power
solar cell
field effect transistors
plasma etching
low density
short circuit
chemical vapor deposition
data center
chance discovery
electron microscopy
room temperature
radio frequency
silicon nitride
low power
multi layer
power consumption
dynamic range