Low loss (<0.2dB per transition) CMOS compatible multi-layer Si3N4-on-SOI platform with thermal-optics device integration for silicon photonics.
Ying HuangXianshu LuoJunfeng SongTsung-Yang LiowPatrick Guo-Qiang LoPublished in: OFC (2014)
Keyphrases
- multi layer
- silicon on insulator
- gate dielectrics
- metal oxide semiconductor
- thin film
- solar cell
- neural network
- cmos technology
- electrical properties
- error back propagation
- image sensor
- neural nets
- plasma etching
- high speed
- si sio
- ibm power processor
- multiple layers
- liquid crystal
- field effect transistors
- metal oxide
- low cost
- single layer
- imaging systems
- infrared
- integrated circuit