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Test structures for dielectric spectroscopy of thin films at microwave frequencies.

Nicola DelmonteB. E. WattsGiovanni ChiorboliPaolo CovaRoberto Menozzi
Published in: Microelectron. Reliab. (2007)
Keyphrases
  • thin film
  • chemical vapor deposition
  • electron microscopy
  • high density
  • grain size
  • silicon nitride
  • database
  • x ray
  • short circuit
  • neural network
  • query processing
  • data warehouse
  • multi layer
  • room temperature
  • solar cell