An Unsupervised Self-Organizing Neural Network for Automatic Semiconductor Wafer Defect Inspection.
Chuan-Yu ChangJia-Wei ChangMuDer JengPublished in: ICRA (2005)
Keyphrases
- neural network
- semiconductor manufacturing
- defect detection
- competitive learning
- back propagation
- data driven
- automated visual inspection
- pattern recognition
- unsupervised learning
- artificial neural networks
- quality control
- neural network model
- machine vision
- integrated circuit
- fully automatic
- genetic algorithm
- fuzzy logic
- supervised learning
- wafer fabrication
- learning vector quantization
- recurrent neural networks
- data sets
- multi layer
- bp neural network
- network architecture
- semi supervised
- supervised classification
- feed forward neural networks
- prediction model
- active learning
- support vector
- radial basis function