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Thermal characterization of a thin film heater on glass substrate for lab-on-chip applications.
Andrea Scorzoni
Michele Tavernelli
Pisana Placidi
Paolo Valigi
Davide Caputo
Giampiero de Cesare
Giulia Petrucci
Augusto Nascetti
Published in:
I2MTC (2014)
Keyphrases
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thin film
high density
film thickness
room temperature
electrical properties
infrared
short circuit
high speed
solar cell
low density
low cost
grain size
multi layer
power plant
chemical vapor deposition
white light interferometry
electron microscopy
analog vlsi
risk management
neural network