Atomic force microscopy (AFM) and X-ray diffraction (XRD) investigations of copper thin films prepared by dc magnetron sputtering technique.
Kah-Yoong ChanBee-San TeoPublished in: Microelectron. J. (2006)
Keyphrases
- atomic force microscopy
- thin film
- x ray
- film thickness
- electron microscopy
- x ray images
- medical imaging
- high density
- magnetic field
- digital x ray images
- transmission electron microscopy
- three dimensional
- intraoperative
- grain size
- ct scans
- tomographic images
- projection images
- low dose
- multi layer
- cone beam
- guide wire
- fluoroscopic images
- cloud computing
- high speed
- pre operative
- chemical vapor deposition
- electron microscope
- neural network