Fault Detection for Plasma Etching Processes Using RBF Neural Networks.
Yaw-Jen ChangPublished in: ISNN (3) (2005)
Keyphrases
- fault detection
- rbf neural network
- fault diagnosis
- industrial processes
- radial basis function
- plasma etching
- fault identification
- bp neural network
- neural network
- expert systems
- tennessee eastman
- rbf network
- fault detection and diagnosis
- failure detection
- robust fault detection
- fuel cell
- fuzzy logic
- neural network model
- decision making
- chemical process
- power supply
- optimal solution
- artificial intelligence
- association rules
- real time
- basis functions